中国科学院苏州纳米技术与纳米仿生研究所机构知识库
Advanced  
SINANO OpenIR  > 纳米器件及相关材料研究部  > 董建荣团队  > 期刊论文
题名: Low specific contact resistivity to graphene achieved by AuGe/Ni/Au and annealing process
作者: Yu, Shu-Zhen(于淑珍); Song, Yan(宋焱); Dong, Jian-Rong(董建荣); Sun, Yu-Run(孙玉润); Zhao, Yong-Ming(赵勇明); He, Yang(何洋)
通讯作者: Yu, Shu-Zhen(于淑珍)
刊名: CHINESE PHYSICS B
发表日期: 2016
DOI: 10.1088/1674-1056/25/11/118101
卷: 25, 期:11
收录类别: SCI
文章类型: 期刊论文
部门归属: 纳米器件及相关材料研究部
英文摘要: Low metal-graphene contact resistance is important in making high-performance graphene devices. In this work, we demonstrate a lower specific contact resistivity of Au0.88Ge0.12/Ni/Au-graphene contact compared with Ti/Au and Ti/Pt/Au contacts. The rapid thermal annealing process was optimized to improve AuGe/Ni/Au contact resistance. Results reveal that both pre- and post-annealing processes are effective for reducing the contact resistance. The specific contact resistivity decreases from 2.5 x 10(-4) to 7.8 x 10(-5) Omega.cm(2) by pre-annealing at 300 degrees C for one hour, and continues to decrease to 9.5 x 10(-7) Omega.cm(2) after post-annealing at 490 degrees C for 60 seconds. These approaches provide reliable means of lowering contact resistance.
关键词[WOS]: RESISTANCE ; DEVICES
语种: 英语
JCR小类分区: 三区
WOS记录号: WOS:000390376900083
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinano.ac.cn/handle/332007/4575
Appears in Collections:纳米器件及相关材料研究部_董建荣团队_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
Yu-2016-Low specific contact resistivity to gr.pdf(441KB)期刊论文作者接受稿限制开放View 联系获取全文

Recommended Citation:
Yu, Shu-Zhen,Song, Yan,Dong, Jian-Rong,et al. Low specific contact resistivity to graphene achieved by AuGe/Ni/Au and annealing process[J]. CHINESE PHYSICS B,2016,25(11).
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Yu, Shu-Zhen(于淑珍)]'s Articles
[Song, Yan(宋焱)]'s Articles
[Dong, Jian-Rong(董建荣)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Yu, Shu-Zhen(于淑珍)]‘s Articles
[Song, Yan(宋焱)]‘s Articles
[Dong, Jian-Rong(董建荣)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Yu-2016-Low specific contact resistivity to gr.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!