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题名: Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure
作者: Wan, L; Zhu, N; Li, X; Zhang, RY(张瑞英); Mei, T
通讯作者: Mei, T
刊名: INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
发表日期: 2016
DOI: 10.1007/s12541-016-0129-2
卷: 17, 期:8
收录类别: SCI ; EI
文章类型: 期刊论文
部门归属: 纳米器件及相关材料研究部
英文摘要: In order to realize the replication of high-quality polymer microstructures with vertical and smooth sidewalls, a gas-assisted hot embossing process with low pressure supplied was optimized to eliminate the swallowtail phenomenon during pattern transfer and simplify workpiece process setting. With help of passive alignment clamp, the rate of replication greater than 95.5% for vertical sidewalls was successfully obtained under the optimum process condition. Accordingly, a root mean square sidewall roughness of 4.6 nm was measured for polymer trenches in comparison with that of 5.7 nm for the silicon mold using a bevel-cut preparation technique. Furthermore, the rate of bulging of less than 15% for polymer workpiece was also obtained. The experiment has demonstrated that high-precise polymer pattern replication is related to both process settings and mold morphology sizes.
关键词[WOS]: FABRICATION ; MICROFABRICATION ; ALIGNMENT ; FILMS
语种: 英语
JCR小类分区: 四区
WOS记录号: WOS:000380669000010
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinano.ac.cn/handle/332007/4691
Appears in Collections:纳米器件及相关材料研究部_董建荣团队_期刊论文

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Recommended Citation:
Wan, L,Zhu, N,Li, X,et al. Optimization for solid polymer microstructure replication using gas-assisted hot embossing under low pressure[J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,2016,17(8).
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文件名: Wan-2016-Optimization for solid polymer micros.pdf
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