中国科学院苏州纳米技术与纳米仿生研究所机构知识库
Advanced  
SINANO OpenIR  > 纳米器件及相关材料研究部  > 沈文江团队  > 期刊论文
题名: Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer With Hermetic Cavities for Immersion Applications
作者: Miao, Jing; Wang, Hui; Li, Peng; Shen, Wenjiang(沈文江); Xue, Chenyang; Xiong, Jijun
通讯作者: Miao, J
刊名: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
发表日期: 2016
DOI: 10.1109/JMEMS.2016.2601312
卷: 25, 期:5
收录类别: SCI
文章类型: 期刊论文
部门归属: 纳米器件及相关材料研究部
英文摘要: Capacitive micromachined ultrasonic transducer (CMUT) can be widely used in ultrasonic devices. After a discussion of the advantages and challenges for the existing CMUT technology especially for immersion applications, this paper presents a glass-silicon-on-insulator (SOI)-based and hybrid-bonded CMUT with hermetic cavities for the first time. It is understood that while anodic bonding can provide good mechanical strength, it is poor in providing sealing. Hence, Au-Au thermal compression bonding is needed. With the hybrid-bonded vacuum-sealing-line, the bond pad can be opened without damaging the vacuum level of the hermetic cavities, which effectively addresses the difficulty in cavity vacuum sealing. Due to structure design and the insulation characteristic of the glass wafer, the CMUT also has highlight in the aspect of no additional stray parasitic capacitances. Furthermore, the low-temperature compatibility of this hybrid-bonded CMUT improves the performance uniformity for both cells and dies. Capacitance-voltage test of device certificates the feasibility of electrical connections and confirms the low parasitic capacitance of device. Topography of the prototype is measured by using white light interferometer to verify the hermetic performance. Frequency response characterization, including dynamic vibration mode, resonance frequency, vibrating deflection and velocity, are carried out with a laser Doppler vibrometer. The immersion test is carried out and demonstrates the transmitting and receiving of ultrasound from fabricated devices. This glass-SOI-based and hybrid-bonded hermetic CMUT shows a great potential for immersion applications. [2015-0280]
关键词[WOS]: 2-D CMUT ARRAYS ; FABRICATION ; SILICON ; INTEGRATION ; TECHNOLOGY ; GENERATION ; SURFACES
语种: 英语
JCR小类分区: 三区
WOS记录号: WOS:000389897800021
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinano.ac.cn/handle/332007/4743
Appears in Collections:纳米器件及相关材料研究部_沈文江团队_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer With Hermetic Cavities for Immersion Applications.pdf(3748KB)----限制开放View 联系获取全文

Recommended Citation:
Miao, Jing,Wang, Hui,Li, Peng,et al. Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer With Hermetic Cavities for Immersion Applications[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2016,25(5).
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Miao, Jing]'s Articles
[Wang, Hui]'s Articles
[Li, Peng]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Miao, Jing]‘s Articles
[Wang, Hui]‘s Articles
[Li, Peng]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer With Hermetic Cavities for Immersion Applications.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!