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题名: Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides
作者: Mackie, KE; Pebley, AC; Butala, MM; Zhang, JP(张锦平); Stucky, GD; Gordon, MJ
通讯作者: Gordon, MJ
刊名: APPLIED PHYSICS LETTERS
发表日期: 2016
DOI: 10.1063/1.4959564
卷: 109, 期:3
收录类别: SCI ; EI
文章类型: 期刊论文
部门归属: 测试分析平台
英文摘要: A general, substrate-independent method for plasma deposition of nanostructured, crystalline metal oxides is presented. The technique uses a flow-through, micro-hollow cathode plasma discharge (supersonic microplasma jet) with a "remote" ring anode to deliver a highly directed flux of growth species to the substrate. A diverse range of nanostructured materials (e.g., CuO, alpha-Fe2O3, and NiO) can be deposited on any room temperature surface, e.g., conductors, insulators, plastics, fibers, and patterned surfaces, in a conformal fashion. The effects of deposition conditions, substrate type, and patterning on film morphology, nanostructure, and surface coverage are highlighted. The synthesis approach presented herein provides a general and tunable method to deposit a variety of functional and hierarchical metal oxide materials on many different surfaces. High surface area, conversion-type CuO electrodes for Li-ion batteries are demonstrated as a proof-of-concept example. Published by AIP Publishing.
关键词[WOS]: LITHIUM-ION BATTERIES ; PLASMA ; PERFORMANCE ; NANOWIRES ; FACILE ; ANODES ; GROWTH ; CARBON ; VAPOR ; FILMS
语种: 英语
JCR小类分区: 二区
WOS记录号: WOS:000381385900061
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinano.ac.cn/handle/332007/4747
Appears in Collections:测试分析平台_期刊论文

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Recommended Citation:
Mackie, KE,Pebley, AC,Butala, MM,et al. Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides[J]. APPLIED PHYSICS LETTERS,2016,109(3).
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文件名: Microplasmas for direct, substrate-independent deposition of nanostructured metal oxides.pdf
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