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题名: Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate
作者: Jiang, T; Xu, SR; Zhang, JC; Li, PX; Huang, J(黄俊); Ren, ZY; Fu, MD; Zhu, JD; Shan, HS; Zhao, Y; Hao, Y
通讯作者: Xu, SR
刊名: OPTICAL MATERIALS EXPRESS
发表日期: 2016
DOI: 10.1364/OME.6.001817
卷: 6, 期:6
收录类别: SCI ; EI
文章类型: 期刊论文
部门归属: 测试分析平台
英文摘要: The epitaxial layers of n-type GaN were grown on both planar and patterned sapphire substrate (PSS) by metal organic chemical vapor deposition. By comparing the epitaxial layers grown on planar substrate, GaN grown on PSS exhibited many improvements both on surface morphology and crystalline quality according to the characterization of atoms force microscopy, and high resolution X-ray diffraction. Spatially resolved micro-Raman scattering results were performed for mapping the spatial variations in crystalline quality of the n-type GaN grown on PSS. According to the variations on the intensity and the full width at half maximum of GaN E-2 (high) peaks, crystalline quality improvement occurred in the lateral growth regions which correspond to center region of the pyramid patterns. We proposed that the bending of dislocations during the lateral growth plays an important role in the spatial variations of GaN crystalline quality. Cross sectional transmission electron microscope and spatial cathodoluminescence mapping results further supported the explanation of the dislocation inhibition during the growth process of GaN grown on PSS. (C) 2016 Optical Society of America
关键词[WOS]: LIGHT-EMITTING-DIODES ; INGAN-BASED LEDS ; MECHANISM ; SIO2
语种: 英语
JCR小类分区: 二区
WOS记录号: WOS:000377507100006
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sinano.ac.cn/handle/332007/4838
Appears in Collections:测试分析平台_期刊论文

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Recommended Citation:
Jiang, T,Xu, SR,Zhang, JC,et al. Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate[J]. OPTICAL MATERIALS EXPRESS,2016,6(6).
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文件名: Spatial distribution of crystalline quality in N-type GaN grown on patterned sapphire substrate.pdf
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