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一种用于离子注入的激光辅助装置及离子注入方法
Alternative Title一种用于离子注入的激光辅助装置及离子注入方法
赵迎春,崔志国,熊敏
2018-12-25
Country中国
patentType发明
Application Date2014-12-30
Application Number201410842399.8
Open (Notice) NumberCN105810572B
Document Type专利
Identifierhttp://ir.sinano.ac.cn/handle/332007/6491
Collection纳米加工公共平台
Recommended Citation
GB/T 7714
赵迎春,崔志国,熊敏. 一种用于离子注入的激光辅助装置及离子注入方法[P]. 2018-12-25.
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