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用于检测器件封装水氧渗透指标的方法及其检测装置
苏文明; 崔铮; 张东煜
Date Available2012-09-25
Country中国
Abstract本发明揭示了一种用于检测器件封装水氧渗透指标的方法及其检测装置。首先制备一镀有活泼金属层的石英晶振片;再将石英晶振片在隔绝空气的情况下转移到测试盒之中并用器件封装相同的封装结构及方法密封,最后将测试盒与晶体振荡器、晶控仪、电源相连构成石英微天平,并接通电源,通过晶控仪感测石英晶振片的压电效应及质量负荷效应,实时向微处理器输出,计算得到金属膜吸收入渗的水氧后增加的质量,进而计算得到单位时间内水氧渗透速率与已渗入的水氧总量。本发明的检测方法和检测装置可用于对水氧敏感器件的封装进行水氧渗透速率的实时在线检测,检测限低于5×10-6g·m-2/d,可满足有机光电器件产品封装对水汽渗透速率的极限检测要求。
Application Date2010-07-27
Patent NumberCN 101949813 B
Language中文
Application Number201010237106.5
Document Type专利
Identifierhttp://ir.sinano.ac.cn/handle/332007/823
Collection印刷电子学部_崔铮团队
Recommended Citation
GB/T 7714
苏文明,崔铮,张东煜. 用于检测器件封装水氧渗透指标的方法及其检测装置. CN 101949813 B.
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